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Method and structure reducing parasitic influences of deflection devices in an integrated spatial light modulator
Method and structure reducing parasitic influences of deflection devices in an integrated spatial light modulator
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机译:减少集成空间光调制器中偏转装置的寄生影响的方法和结构
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摘要
A method of fabricating an integrated spatial light modulator with contact structures. The method includes providing a first substrate having a bonding surface, providing a device substrate having a device surface, and depositing a first layer on the device surface, the first layer having an upper surface opposite the device surface. The method also includes patterning the first layer to define a plurality of contact structure openings, depositing a conductive layer on the upper surface of the first layer, reducing the thickness of the conductive layer, and removing at least a portion of the first layer to expose a plurality of contact structures. The method further includes depositing a standoff layer on the first layer, forming standoff structures from the standoff layer, and joining the bonding surface of the first substrate to the standoff structures to form a bonded substrate structure.
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