Enhanced sputter target manufacturing method

摘要

Method of manufacturing a cobalt or chromium or iron or nickel comprises heating raw materials under vacuum or under a partial tlakuargonu (Ar) to a fully liquid state to form a molten alloy corresponding to the system, solidifying the molten alloy into an ingot, and reheating the ingot to a fully liquid state to form a diffuse molten alloy, followed následujerychlé solidification of the diffuse molten alloy into a homogeneous pre-alloyed material, incorporation of net elemental powder, the homogeneous pre-alloyed material solidifies into a fully dense homogeneous material, and hot rolling. The method further comprises rolling dense homogeneous material cold processing at the sputter target.