LOW SURFACE TENSION, LOW VISCOSITY, AQUEOUS, ACIDIC COMPOSITIONS CONTAINING FLUORIDE AND ORGANIC, POLAR SOLVENTS FOR REMOVAL OF PHOTORESIST AND ORGANIC AND INORGANIC ETCH RESIDUES AT ROOM TEMPERATURE

摘要

THE PRESENT INVENTION RELATES TO COMPOSITIONS USEFUL IN REMOVING PHOTORESIST AND ORGANIC AND INORGANIC RESIDUES AND PROCESSES FOR REMOVAL OF PHOTORESISTS AND ETCH RESIDUES. THE COMPOSITIONS ARE AQUEOUS, ACIDIC COMPOSITION CONTAINING FLUORIDE AND ORGANIC POLAR SOLVENTS. THE COMPOSITIONS ARE FREE OF GLYCOLS AND HAVE A LOW SURFACE TENSION AND VISCOSITY. CORROSION INHIBITORS ARE OPTIONALLY PRESENT.