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MORPHOLOGY AND SPECTROSCOPY OF NANOSCALE REGIONS USING X-RAYS GENERATED BY LASER PRODUCED PLASMA
MORPHOLOGY AND SPECTROSCOPY OF NANOSCALE REGIONS USING X-RAYS GENERATED BY LASER PRODUCED PLASMA
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机译:激光等离子体产生的X射线对纳米尺度区域的形貌和光谱学
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摘要
A system and method is disclosed for generation of a nanoplasma and/or nanofluorescence. The system includes an emissions source of soft x-rays. The emissions source can include a laser system as an energy source and target material that acts as a radiation source when illuminated by the laser system. The system further includes focusing optics particularly suited for manipulation of wavelengths associated with x-rays. The focusing optics can focus the x-rays onto a desired target so that a nanoplasma or nanofluorescent spot can be formed to have a diameter of less than 200nm. Radiation from the nanoplasma or nanofluorescent spot can be examined, for example using a spectrometer, in order to perform a highly-selective material analysis of the desired target. Other applications include using the nanoplasma for nanoablation and/or nanodeposition processes.
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