首页>
外国专利>
SYSTEM AND METHOD FOR SEARCHING FOR PATTERNS OF SEMICONDUCTOR WAFER FEATURES IN SEMICONDUCTOR WAFER DATA
SYSTEM AND METHOD FOR SEARCHING FOR PATTERNS OF SEMICONDUCTOR WAFER FEATURES IN SEMICONDUCTOR WAFER DATA
展开▼
机译:在半导体晶片数据中寻找半导体晶片特征的图形的系统和方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
A system for searching for patterns of semiconductor wafer features for use in silicon manufacturing and device fabrication processes, the system including: a data acquisition system 00 for acquiring scan data from differing types of semiconductor wafer scanning tools such as wafer dimensional tools 10, wafer inspection tools 12, and wafer nanotopography tools 14; a buffer system 02 for providing temporary storage for scan data transmitted and for providing fault tolerance; a server system 04 for providing storage for the scan data transmitted from the buffer system 02 and converting the scan data into a format used by and stored in a database 08 management system; an analysis system 06 client station including a display and communicating with the server system 04, the analysis system 06 and the server system 04 providing scan data structuring and query operations and data transfer operations.
展开▼