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APPARATUS AND METHOD FOR IN SITU AND EX SITU MEASUREMENT OF SPATIAL IMPULSE RESPONSE OF AN OPTICAL SYSTEM USING PHASE-SHIFTING POINT-DIFFRACTION INTERFEROMETRY
APPARATUS AND METHOD FOR IN SITU AND EX SITU MEASUREMENT OF SPATIAL IMPULSE RESPONSE OF AN OPTICAL SYSTEM USING PHASE-SHIFTING POINT-DIFFRACTION INTERFEROMETRY
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机译:利用移相点衍射干涉法现场测量光学系统空间脉冲响应的装置和方法
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摘要
A point diffraction interferometer for measuring properties of a spatial impulse response function, the interferometer including: a source for generating a source beam; an optical system; an optical element including a test object located in an object plane of the optical system, the test object including a diffraction point for generating from the source beam a measurement beam that passes through the optical system, wherein the optical element also generates from the source beam a reference beam that is combined with the measurement beam to generate an interference pattern in an image plane of the optical system, the interference pattern representing the spatial impulse response function of the optical system.
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