Method for locally compensating the temperature drift of sensors in the mounted state and device for compensating the temperature drift of a semiconductor acceleration sensor

摘要

The method involves loading a temperature-sensitive part of a sensor in a mounted condition with a defined temperature profile for determination of a temperature drift curve, where sensor is arranged on a semiconductor substrate (1). A determination is made to find whether signal changes of the sensor are correlated with the corresponding temperature changes, where the signals changes are detected with the throughput of the profile. An independent claim is also included for a device for executing a method for compensating temperature drift of a semiconductor acceleration sensor.