MAGLEV OBJECT POSITIONING APPARATUS AND METHOD FOR POSITIONING AN OBJECT AND MAINTAINING POSITION WITH HIGH STABILITY

摘要

The proposed object positioning apparatus comprises a dynamically and thermally stable frame (1) and at least one stage (3), at least one maglev actuator assembly (4) for providing controllable electromagnetic movement, that is drive and/or guide capability of said stage, controlling means configured to drive and guide said maglev stage, and docking means (5) configured to establish a mechanical contact between said stage and said stable frame. Thus, first the object can be accurately moved to its desired position and then mechanically docked to a stiff and stable reference.