METHOD OF LIFTOFF WORKING AND LIFTOFF WORKING APPARATUS

摘要

An apparatus including hermetically sealed container (1) capable of immersion of work specimen (W) in solvent (G) and pressurization thereon and pressurization means (2) for pressurizing of the interior of the hermetically sealed container (1) so that the work specimen (W) in the state of being immersed in the solvent (G) is introduced in the hermetically sealed container (1) and pressurized by the use of the pressurization means (2). Accordingly, the solvent (G) is forced into narrow gaps of the work specimen (W) into which penetration is infeasible at ordinary pressure to thereby allow swelling of a resist mask being a liftoff specimen and thus allow liftoff even when the pattern thereof is fine. As the pressurization means, use can be made of a supercritical fluid.