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METHOD AND FINE-CONTROL COLLIMATOR FOR ACCURATE COLLIMATION AND PRECISE PARALLEL ALIGNMENT OF SCANNED ION BEAMS
METHOD AND FINE-CONTROL COLLIMATOR FOR ACCURATE COLLIMATION AND PRECISE PARALLEL ALIGNMENT OF SCANNED ION BEAMS
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机译:斜离子束的精确匹配和精确平行对齐的方法和精细控制匹配器
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摘要
In a system for implanting workpieces with an accurately parallel scanned ion beam, a fine-control collimator construct is used to reduce the deviation of the scanned ion beam from a specified axis of parallelism and thereby improve its collimation. The shape of the fine-control collimator matches the ribbon shape of the beam and correction of parallelism in two orthogonal directions is possible. Measurement of the non-parallelism is accomplished by sampling the scanned beam in two planes and comparing timing information; and such measurement is calibrated to the orientation of the workpiece in the plane where ion implantation occurs. Measurement of non-uniformity in the doping profile is accomplished using the same means; and the scan wavefonn is adjusted to substantially remove any non-uniformity in the doping profile.
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