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NONVOLATILE POLYMER BISTABILITY MEMORY DEVICES UTILIZING NANO PARTICLES EMBEDDED IN POLYMER THIN FILMS AND MANUFACTURING METHOD THEREOF
NONVOLATILE POLYMER BISTABILITY MEMORY DEVICES UTILIZING NANO PARTICLES EMBEDDED IN POLYMER THIN FILMS AND MANUFACTURING METHOD THEREOF
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机译:利用高分子薄膜中嵌入的纳米颗粒的非挥发性聚合物双稳态记忆装置及其制造方法
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摘要
A non-volatile polymer bistable memory device using a nano crystal formed within a polymer thin film is provided to simplify a fabricating process while using a charge capture property of nano crystals self-assembled in a polymer thin film. A first electrode(120) is formed on a semiconductor substrate(110). A polymer thin film(130) is formed on the first electrode. A nano crystal(140) is diffused into the polymer thin film. A second electrode(150) is formed on the polymer thin film. The polymer thin film is made of polyimide. The nano crystal can be Cu2O. The first and second electrodes cross each other.
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