APPARATUS FOR PRESERVING DEIONIZED WATER AND METHOD FOR SUPPLYING DEIONIZED WATER USING THE SAME

摘要

A DIW(deionized water) storing receptacle is provided to avoid contamination of equipment or a work loss caused by a resistance value of DIW not reaching the resistance value required by the equipment by checking the resistance value of the DIW required by the equipment before the DIW is supplied to a process chamber in which a process using the DIW is performed. A DIW storing receptacle(10) includes a body part(100), a resistivity detecting part(200) and a control part. The body part is filled with DIW. The resistivity detecting part measures the resistance value of the DIW in the body part. The control part generates a predetermined control signal in response to a detection signal transferred from the resistivity detecting part. A display part(400) receives the control signal of the control part to display the resistance value of the DIW, including a display apparatus.