THE SURFACE SPREADING METHOD OF PROBE NEEDLE INSTALLED TO PROBE CARD

摘要

A method for processing a surface of a probe needle installed on a probe card is provided to improve abrasion resistance of the probe needle and to prevent damage due to abrasion by coating a conductive coating layer on the surface of the probe needle. A tip(21) of a probe needle(2) is exposed by blocking a probe card and a body(22) of the probe needle with an object. The probe card and the probe needle are installed at a coating processing apparatus. A conductive coating layer(3) is coated on a surface of the tip of the probe needle. In case the tip is worn away, residuals and dirt residing on a surface of the conductive coating layer are cleaned. Another conductive coating layer is coated on the surface of the tip.