THERMAL SPRAY COATING WITH AMORPHOUS METAL LAYER THEREIN AND FABRICATION METHOD THEREOF

摘要

The present invention provides a thermal spray coating film comprising a metal layer and a ceramic layer containing an amorphous phase formed on the surface of the base material by thermal spraying. The amorphous metal material and the ceramic powder are injected into the plasma gun to form a composite coating film of the amorphous metal layer and the ceramic layer by thermal spraying on the surface of the base material. The coating film is particularly suitable as a coating film for chambers used in various electronic product manufacturing equipment such as semiconductors, LCDs, PDPs, and organic EL displays, and various metal parts mounted therein. Such coatings significantly reduce the incidence of contaminants from the chamber and component surfaces, and have high adhesion / corrosion resistance.;Thermal spraying, amorphous metal layer, ceramic layer