XY STAGE MODULE, STORAGE SYSTEM EMPLOYING THE SAME AND METHOD FOR FABRICATING THE XY STAGE MODULE

摘要

An XY stage module, an information storage apparatus adopted with the module, and a manufacturing method of the XY stage module are provided to enable a position sensor of the XY stage module to measure a position by using capacitance alterations, thus the position is more precisely measured while the module is less influenced by external environmental changes. An XY stage(20) horizontally moves in the second direction orthogonal to the first direction on a base(15). A supporting unit elastically supports the stage(20) by being installed on the base(15). A stiffener(40) stops rotation of the stage(20). A position sensor is disposed on one side of the stiffener(40), and consists of a moving pectinated structure(52) having at least more than one moving pectination(521) and a fixed pectinated structure(53) having at least more than one fixed pectination(531) engaged with the moving pectinations(521) at certain intervals by being fixed to the base(15). The sensor measures displacement in the first and second directions of the stage(20) according to a degree that the moving pectinations(521) and the fixed pectinations(531) are engaged together.