首页> 外国专利> Image sensor with buried barrier layer having different thickness according to wavelength of light and method of formign the same

Image sensor with buried barrier layer having different thickness according to wavelength of light and method of formign the same

机译:具有根据光的波长而具有不同厚度的掩埋阻挡层的图像传感器及其形成方法

摘要

to prevent the color mixing phenomenon discloses an image sensor and a method which can improve the sensitivity . The sensor is provided with a wavelength of the pixels for implementing the different color , and each of the pixels is provided with a buried barrier layer having different thickness according to the wavelength , but the position in the photoelectric conversion portion and the lower photoelectric conversion section . A method of forming the sensor is provided with a step of forming the epitaxial layer and the buried barrier layer in the step of the first type for forming the epitaxial layer of a first type on a semiconductor substrate of a first type . At this time, the thickness of the buried barrier layer is formed differently depending on the wavelength .
机译:为了防止颜色混合现象,公开了一种图像传感器及其可以提高灵敏度的方法。传感器具有用于实现不同颜色的像素的波长,并且每个像素均具有根据波长具有不同厚度的掩埋阻挡层,但是在光电转换部和下部光电转换部中的位置。形成传感器的方法包括在第一类型的步骤中形成外延层和掩埋阻挡层的步骤,以在第一类型的半导体衬底上形成第一类型的外延层。此时,根据波长不同地形成掩埋阻挡层的厚度。

著录项

  • 公开/公告号KR100684878B1

    专利类型

  • 公开/公告日2007-02-20

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20050006371

  • 发明设计人 박영훈;

    申请日2005-01-24

  • 分类号H01L27/146;

  • 国家 KR

  • 入库时间 2022-08-21 20:32:54

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