QUARTZ GLASS SINGLE HOLE NOZZLE AND QUARTZ GLASS MULTI-HOLE BURNER HEAD FOR FEEDING FLUID

摘要

The present invention, the flow rate control can be performed with high accuracy, the tip end portion by a contact with the workpiece , that is, as it is even if the nozzle is broken when replacing the nozzle that do not have to exchange the entire expensive quartz glass burner, and when applied to a metal burner or a heat-resistant quartz glass, and to bring the transmission fluid contamination resistance geupyong stage provides a multi-hole nozzle and a quartz glass burner for heat processing, and for feeding fluid which suitably used in the non-burning and processing with a nozzle hole, and that the burner head is provided with a hole in the burner head quartz glass burner for heat processing. Quartz glass single hole nozzle for feeding fluid according to the present invention, has a mounting portion provided on the nozzle body and the nozzle body portion proximal end portion formed by the quartz glass material, a fluid passage is fed to the inside of the machinability and the nozzle body, and the mounting portion, has to be equipped with a freely attachable to the distal end of the body via burner for heat processing.