METHOD AND APPARATUS FOR TESTING THE FUNCTION OF A PLURALITY OF ACTIVE MICROSTRUCTURAL ELEMENTS AND METHOD FOR THE PRODUCTION OF ACTIVE MICROSTRUCTURAL ELEMENTS WITH SUCH A METHOD

摘要

The test system uses an electron beam (5), line output and secondary electron emission (6) measurement (13) to perform contactless testing of electronic and mechanical micro structure devices (1). Devices which fail are retested automatically to avoid failures due solely to being close to the boundary level.