SILICON FABRY-PEROT WAVELENGTH TUNABLE FILTER USING THERMO-OPTIC EFFECT AND METHOD FOR MANUFACTURING THE SAME

摘要

The present invention provides a method for manufacturing a silicon Fabry-Perot wavelength variable filter using thermo-optic phenomena through a small number of manufacturing steps, and a silicon Fabry-Perot using thermo-optic phenomena manufactured by the method and capable of transmitting data at high data rates. The wavelength tunable filter relates to a method for manufacturing a Fabry-Perot wavelength tunable filter, by applying a photoresist film to a silicon wafer, and performing imprinting on the silicon wafer to which the photoresist film is applied to form a predetermined pattern, and by imprinting. Etching the silicon wafer of the portion where the photoresist film has been removed and forming an oxide film in the etched space.;Fabry-Perot, Tunable, Filter, Thermo-optic Phenomena