LIFT PIN LEVELERS AND METHODS OF ALIGNING LIFT PIN USING THE SAME

摘要

Lift pin levelers and methods for aligning lift pins using the same are provided to maintain an alignment state between a substrate receiving body and a semiconductor substrate during a semiconductor manufacturing process. A contacting body(20) is arranged to perform vertical movement by passing through an upper housing(30). The contacting body is screw-coupled to a part of the upper housing. A pressure body(60) passes through a middle housing(80) covered by the upper housing. The pressure body is arranged in the middle housing to perform vertical movement. The pressure body is screw-coupled to a part of the middle housing and the contacting body. An alignment body(140) is arranged in a lower housing(110) under the rest of the middle housing and the upper and middle housings. The alignment body has the same center as the contacting body and the pressure body. The alignment body is screw-coupled to a part of the pressure body.