Analytic Structure For Failure Analysis Of Semiconductor Device And Method Of Failure Analysis Using The Same

摘要

It provides a structure analysis and failure analysis method using the same for the failure analysis of the semiconductor device. This device is the semiconductor transistor, forming a plurality of analysis regions, the array structure disposed on a predetermined region of the semiconductor substrate is arranged on the semiconductor transistors, wherein the analysis region disposed in said analysis area in a transverse and longitudinal It includes word lines and bit lines connecting structure. At this time, the bit line structures are characterized by having a different structure for each of said analysis region.