首页> 外国专利> Optical probe using constructive interference of incident light, optical data storage comprising the same optical probe, and method of fabricating the same optical probe

Optical probe using constructive interference of incident light, optical data storage comprising the same optical probe, and method of fabricating the same optical probe

机译:利用入射光的相长干涉的光学探针,包括该光学探针的光学数据存储装置以及制造该光学探针的方法

摘要

An optical probe using constructive interference of incident light, an optical data storage having the same, and a method for fabricating the same are provided to maximize transmittance of an aperture through the constructive interference. An aperture oxide layer(130) is formed in a bent shape by using an effect of bird's beak to reduce an optical loss region. A metallic thin film(150) is formed on the aperture oxide layer, and has a scattered structure for scattering incident light. An optical probe is adapted so that light transmittance is increased by the scattered structure. The scatter structure is adapted so that the incident light is constructive-interfered with the scatter light.
机译:提供了一种使用入射光的相长干涉的光学探针,具有该光学探针的光学数据存储装置及其制造方法,以通过该相长干涉来最大化孔的透射率。通过利用鸟嘴效应来减小光损失区域,以弯曲的形状形成开口氧化物层(130)。金属薄膜(150)形成在开口氧化物层上,并具有用于散射入射光的散射结构。光学探头被适配为使得光的透射率通过散射结构而增加。调整散射结构,使得入射光与散射光相长干涉。

著录项

  • 公开/公告号KR100753828B1

    专利类型

  • 公开/公告日2007-08-31

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20060027202

  • 发明设计人 박강호;김은경;이성규;

    申请日2006-03-25

  • 分类号H01L21/66;

  • 国家 KR

  • 入库时间 2022-08-21 20:31:26

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