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Optical probe using constructive interference of incident light, optical data storage comprising the same optical probe, and method of fabricating the same optical probe
Optical probe using constructive interference of incident light, optical data storage comprising the same optical probe, and method of fabricating the same optical probe
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机译:利用入射光的相长干涉的光学探针,包括该光学探针的光学数据存储装置以及制造该光学探针的方法
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摘要
An optical probe using constructive interference of incident light, an optical data storage having the same, and a method for fabricating the same are provided to maximize transmittance of an aperture through the constructive interference. An aperture oxide layer(130) is formed in a bent shape by using an effect of bird's beak to reduce an optical loss region. A metallic thin film(150) is formed on the aperture oxide layer, and has a scattered structure for scattering incident light. An optical probe is adapted so that light transmittance is increased by the scattered structure. The scatter structure is adapted so that the incident light is constructive-interfered with the scatter light.
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