METHOD OF PRODUCTION OF AMORPHOUS MAGNETIC FILMS Co-P

摘要

FIELD: chemical deposition of amorphous magnetic films Co-P on polished glass, for example; computer engineering; recording and playback heads; magnetic field sensors; controllable SHF units: filters, amplitude and phase modulators.;SUBSTANCE: proposed method includes cleaning of glass substrate, double sensitization in tin chloride solution at intermediate treatment in hydrogen peroxide solution on base of palladium chloride followed by heat treatment at temperature of 150-450C for 30-40 minutes and deposition of magnetic amorphous film Co-P. To improve quality of amorphous magnetic films, deposition is performed on additional non-magnetic Ni-P layer, 20-30 nm thick at application of homogeneous permanent magnetic field in substrate plane.;EFFECT: enhanced efficiency.;1 tbl, 1 ex