Impedance adaptation apparatus for a sio2 - coating system

摘要

Impedance adaptation apparatus for a sio₂-Coating system, wherein said devicethe following constituents comprises:an interworking unit (10) for matching the impedance of an oscillator to the impedance of a coating unit;the adjusting unit has a coil (l11), whose first terminal is connected to one of the input terminals of the adjusting unit is connected,a first variable capacitor (cv11), the parallel to the input terminals (rfin) is connected to the interworking unit,a second variable capacitor cv12) having a first terminal connected to the second terminal of the coil and whose second terminal is connected to one of the output connections (rfout) is connected to the interworking unit;a voltage converter (21), consisting of a first (c21), second (c22), third (c23) and fourth (c24) capacitor, which are connected in series, in which the first capacitor (c21) on a side with the second terminal of the second capacitor (cv12) is connected in order to change the amplitude of the voltage output by the interworking unit to a predetermined amplitude;a filter unit (25) for filtering the..