Emission electron microscope has optical lens system with objective, imaging system with lens, stigmator, second imaging system parallel to first, electron detectors

摘要

The device has an electron optical lens system consisting of an objective lens, an imaging system (K1) with at least one lens and a stigmator, a second imaging system (K2) parallel to the first and two electron detectors (25,27) for detecting two independent images, a real image and an image of the angular distribution of the electrons, an electron source (8), a contrast stop system (4a) and an image stop system (11).