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A process for the preparation of a photonic band gap - - - structure and component with a produced in such photonic band gap - - - structure
A process for the preparation of a photonic band gap - - - structure and component with a produced in such photonic band gap - - - structure
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机译:一种制备光子带隙-结构的方法和具有这种光子带隙-结构的部件
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摘要
A process for the preparation of a photonic band gap - - - structure (pbg - structure) on a substrate with the following process steps:– In conformity with respect to each other form a coplanar shafts conductors - metallizations (3; 3 '') on the surfaces of two substrates (1; 1'');– Contacting the relative to one another, which is constructed to conform to the coplanar shafts conductors - metallizations (3; 3 '') of the two substrates (1; 1''); and– structured etching back of the two substrates (1; 1 '') of the coplanar shafts conductors - metallizations (3; 3'') opposite surfaces of the two substrates (1; 1 '').
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