Lithographic projector optical element mount has three angle adjustable positioners using rotating tapers locked by screws

摘要

An lithographic projector optical element (3) mount (10) has three angle adjustable (16) positioners (12) between the element and base (11) with rotating ceramic or nickel iron tapers locked after adjustment by screws. Independent claims are included for lithographic objectives and lithographic projectors for semiconductor manufacture using the mount.