Flow sensor arrangement for measuring temperature of liquid media, has temperature sensor and heating unit integrated in diaphragm, where diaphragm exhibits reinforcement by backfill within cavern

摘要

The arrangement has a sensor chip unit for measuring the physical quantities of a flow media. A temperature sensor (1) and a heating unit (2) are integrated in a diaphragm (3) as conducting paths, where a spatial cavern (4.1) is formed in the sensor chip. The diaphragm exhibits reinforcement by a backfill (4.2) within the cavern, where the backfill consists of a layer of liquid medium.