Lens e.g. illumination lens, for use in microlithography system, has optical lenses aligned to each other according to local distribution or variation of their optical characteristics, where lenses are arranged along optical axis

摘要

The lens has a set of optical lenses that are aligned to each other according to local distribution or variation of their optical characteristics, where mutual alignment of the lenses takes place by determining an azimuthal orientation and/or rotation of the lenses around an optical axis, along which the lenses are arranged. A range of maximum deviation of the optical characteristic such as a range of transmission modulation is specified for each optical lens, where the range of maximum deviation is aligned with respect to the optical axis. An independent claim is also included for a method for manufacturing a lens.