Process for coating valve metal or alloy for e.g. aluminum or alloy rotor for turbomolecular pump involves vapor coating with optionally halogenated xylylene dimer and polymerization in capillary system of surface film of oxide ceramic

摘要

In coating articles of valve metals selected from aluminum, magnesium, titanium, niobium and/or zirconium and their alloys having an oxide ceramic film (A) formed from the metal, which acts as barrier to the metal, the surface is coated with polymers (B) by introducing (B) in the form of (halogenated) xylylene dimers (I) into the capillary system of (A) by vacuum coating and (I) are polymerized. In coating articles of valve metals selected from aluminum, magnesium, titanium, niobium and/or zirconium and their alloys having an oxide ceramic film (A) formed from the metal, which acts as barrier to the metal, the surface is coated with polymers (B) by introducing (B) in the form of (halogenated) xylylene dimers of formula (I) into the capillary system of (A) by vacuum coating and (I) are polymerized: R 1, R 2H or halogen; R 3a group completing a dimeric structure for a corresponding xylyl group . An independent claim is included for coated valve metal articles produced by this process. [Image].