Automated positioning method for objects, involves carrying out of approximate adjustment on basis of existing coordinate information and fine adjustment on basis of coordinate information determined from additional information

摘要

The method involves carrying out of detailed analysis for a critically judged region or positions. An approximate adjustment for critically judged regions is carried out on the basis of existing coordinate information and a fine adjustment for critically judged positions is carried out on the basis of the coordinate information determined from additional information. The approximate and the fine adjustment is done after arranging and aligning the sample on a positioning unit and adjusting the corresponding measurement conditions.