Self organized needle-like nanostructure, has smaller nanodimesion and larger aspect ratio in statistically homogenous arrangement on silicon surface, where surface is coated with thin metal layer which is used as heat supply

摘要

The structure has a nanodimesion smaller than a light wave length and an aspect ratio larger than 4:1 in statistically homogenous arrangement on a silicon surface. The structure is produced in a single process step during an etching process using working gases oxygen and sulphur hexafluoride. The structure is produced on a silicon surface (2) by a rocket immuno electrophoresis (RIE) method, where the silicon surface is coated with thin metal layer that is used as a specific heat supply.