Air bearing has pressure sensor mounted in air feed line whose outlets surround chamber facing bearing surface and connected to vacuum pump, allowing height of air gap to be adjusted

摘要

The air bearing has a pressure sensor (15) mounted in the air feed line (11). The air outlets surround a chamber (12) which faces the bearing surface (8) and is connected to a vacuum pump, allowing the height of the air gap (9) to be adjusted. Independent claims are included for: (A) a method for adjusting the height of the air gap; and (B) use of the air bearing as a mounting for a specimen whose surface topography is to be determined.