Guided bulk acoustic wave operated component for e.g. ladder filter, has dielectric layer with low acoustic impedance, and metal layer including partial layer with high impedance, where ratio between impedances lies in certain range

摘要

The component has a piezoelectric substrate (1) and a broad thicker substrate (2), where a layer system (3) is arranged between the substrates (1, 2) and includes a metal layer and a dielectric layer (32). The dielectric layer has relatively low acoustic impedance, and the metal layer has a partial layer with relatively high acoustic impedance, where a ratio between the acoustic impedances is greater than or equal to 4.5. An independent claim is also included for a method for producing a guided bulk acoustic wave (GBAW) operated component.