Position measuring device, has sensing plate supporting hologram consisting of laminar partial holograms that deflect incident laser light in direction of photodetectors, which are assigned to partial holograms, respectively

摘要

The device has a laser light source (1), and a sensing head (3) with photodetectors (7), which receive laser light of the source. A sensing plate (4) supports a hologram (H) consisting of laminar partial holograms that are interlaced into one another. The partial holograms deflect incident laser light in the direction of the photodetectors, which are assigned to the partial holograms, respectively. The partial holograms are arranged periodically next to one another in regular strips and in a measuring direction.