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Aom - modulation techniques for the improvement of the laser system power

机译:调光技术可提高激光系统的功率

摘要

Digital control of frequency and/or amplitude modulation techniques of an intracavity and/or extracavity AOM (60) facilitate substantially full extinction of a laser beam (90) to prevent unwanted laser energy from impinging a workpiece (80); facilitate laser pulse amplitude stability through closed-loop control of pulse-to-pulse laser energy; facilitate beam-positioning control including, but not limited to, closed-loop control for applications such as alignment error correction, beam walk rectification, or tertiary positioning; and facilitate employment of more than one transducer on an AOM (60) to perform any of the above-listed applications.
机译:腔内和/或腔外AOM(60)的频率和/或振幅调制技术的数字控制促进激光束(90)的基本完全消光,以防止不想要的激光能量撞击工件(80);通过对脉冲间的激光能量进行闭环控制,提高激光脉冲幅度的稳定性;促进光束定位控制,包括但不限于针对对准误差校正,光束走动整流或三次定位等应用的闭环控制;并促进在AOM(60)上使用多个换能器来执行上述任何应用。

著录项

  • 公开/公告号DE112005001324T5

    专利类型

  • 公开/公告日2007-08-23

    原文格式PDF

  • 申请/专利权人 ELECTRO SCIENTIFIC INDUSTRIES INC.;

    申请/专利号DE20051101324

  • 发明设计人

    申请日2005-06-06

  • 分类号G02F1/33;G01N29/04;

  • 国家 DE

  • 入库时间 2022-08-21 20:29:33

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