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Method and system for dynamically adjusting the measuring data acceptance on the basis of the available measuring capacity
Method and system for dynamically adjusting the measuring data acceptance on the basis of the available measuring capacity
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机译:基于可用测量能力动态调整测量数据接受度的方法和系统
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摘要
The present invention is generally directed to various methods and systems for dynamically adjusting metrology sampling based upon available metrology capacity. In one illustrative embodiment, the method comprises providing a metrology control unit that is adapted to determine a baseline metrology sampling rate for at least one metrology operation, determining available metrology capacity, and providing the determined available metrology capacity to the metrology control unit wherein the metrology control unit determines a new metrology sampling rate based upon the determined available metrology capacity.
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