Device for precise measurement of surface of test specimen, has scanning device with lens positioned relative to surface of specimen such that radiation source is arranged for radiation reflected to surface of specimen

摘要

The device has scanning device with a lens (5) positioned relative to the surface of the specimen (7) such that a radiation source is arranged for a radiation reflected to the surface of the specimen. The radiation (4) runs through the lens which is positioned by scanning device so that the radiation surface of the specimen is focused. A receiving device receiving a part of the reflected radiation (4), whose output signal can be evaluated as a measuring signal for the surface at the impinging point by means of an evaluation device. An independent claim is included for method for highly precise measurement of surface of test specimen.