Handling device e.g. manipulator, for use in e.g. wafer tester, has two joint arms with two ends that are flexibly connected with fastener and horizontal slide, respectively, and guide rail to move column that is adjusted by locking lever

摘要

The device has a positioning unit to position a test head (60) and a fastener (50) that is connected with the unit to fasten the head. The unit has a column (20) extending in a vertical direction and a horizontal slide (30) that is arranged at the column adjustable in the vertical direction and is transverse in a horizontal direction. Two joint arms (70) have two ends (71, 72) that are flexibly connected with the fastener and the slide, respectively. A guide rail (12) is arranged on a girder (11) to move the column that is adjusted by a locking lever in a given position to a base frame (10).