Generator of X-ray, or extreme UV (XUV) radiation includes deflection of particle beam, including two deflection points on axis of preset (table) impingement point, acting independently of each other, for X-ray tubes and similar devices

摘要

Generator directs charged particle beam (12) onto target (16) by beam deflector so that centre axis (18) of beam passes through two spaced deflection points (20,22).Both deflection points are coaxial with preset (table) impingement point (24) of beam on target. Particle beam is deflectable by both deflection points independently of each other. There are specified modifications of deflection system.