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Combined structure with improved ability to shock receiving and stress insulation for an improved micromechanical silicon acceleration sensor
Combined structure with improved ability to shock receiving and stress insulation for an improved micromechanical silicon acceleration sensor
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机译:具有改进的减震和应力绝缘能力的组合结构,用于改进的微机械硅加速度传感器
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摘要
The present invention provides an acceleration sensor (100) and an accelerometer (106) having isolation structure formed using a bulk straight wall deep reactive ion etch process, whereby external stress sources are isolated from active accelerometer components.
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