A method of and an arrangement for characterizing non-linear behavior of RF and microwave devices under test (3) in a near matched environment. The method comprises the steps of exciting the device (3) by an RF signal under different load conditions (4), measuring (8) signal data at input and output ports (1, 2) of the device (3), verifying whether the measurement data meet predetermined quality criteria; calculating, from the measurement data, model parameters of a predetermined model for characterizing the non-linear behavior of the device, and verifying assumptions made in the characterization model by collecting (8) additional measurement data and comparing same with data calculated from the model using the model parameters calculated. The load conditions (4) are obtained by connecting to the output port (2) of the device (3) a matched load, an open, a short and a plurality of attenuators and delays.
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