Acoustically coupled thin film - transformer with a piezoelectric material, which, opposite c - axen orientation

摘要

An embodiment of the acoustically-coupled transformer has first and second stacked bulk acoustic resonators (SBARs) (206,208) each having a stacked pair of film bulk acoustic resonators (FBARs) with an acoustic decoupler between the FBARs . Each FBAR has opposed planar electrodes with piezoelectric material between the electrodes. A first electrical circuit connects one FBARs of the first SBAR to one FBAR of the second SBAR, and a second electrical circuit connects the other FBAR of the first SBAR to the other FBAR of the second SBAR. The c-axis of the piezoelectric material of one of the FBARs is opposite in direction to the c-axes of the piezoelectric materials of the other three FBARs. This arrangement substantially reduces the amplitude of signal-frequency voltages across the acoustic decouplers and significantly improves the common mode rejection of the transformer. This arrangement also allows conductive acoustic decouplers to be used, increasing the available choice of acoustic decoupler materials.