A method in order to achieve a substantially uniform surface potential of an insulating object

摘要

An apparatus effects a uniform surface potential on an insulating specimen in an x-ray photoelectron or a secondary ion emission instrument in which there is positive charging of an irradiation region. An area of the specimen including the irradiation region is flooded with a beam of low energy electrons to neutralize the positive charging, causing negative charging of the flooding area. Positive ions are directed onto the flooding area to neutralize the negative charging. The electron beam has an energy less than about 2 eV and an energy spread less than about 0.5 eV. The ratio of the beam distance to its diameter is less than about 10. The ions have an energy less than 10 eV.