IMPACT DOT MEASUREMENT METHOD, IMPACT DOT MEASUREMENT APPARATUS, AND LIQUID DROP DISCHARGE APPARATUS, MANUFACTURING METHOD OF ELECTRO-OPTICAL APPARATUS, THE ELECTRO-OPTICAL APPARATUS AND ELECTRONIC DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an impact dot measurement method and an impact dot measurement apparatus for accurately and efficiently measuring impact dots.;SOLUTION: The impact dot D measurement method measures a shape of the impact dot as a functional liquid drop impacted on an inspection sheet by an inspection discharge from a functional liquid drop discharge head 17 by the use of a profile measurement apparatus comprising a white-color interferometer 181, and comprises an inspection discharge process for implementing the inspection discharge from one of a plurality of discharge nozzles 98 in the functional liquid drop discharge head 17 in a time interval, while the functional liquid drop discharge head 17 is moved in the main scan direction; and a measurement process for measuring the shape of each impact dot D, while the profile measurement apparatus tracks the functional liquid drop discharge head 17, as well as, is moved in the main scan direction at the same speed.;COPYRIGHT: (C)2008,JPO&INPIT