METHOD FOR MANUFACTURING COMPOSITION FOR FORMING ORGANIC ANTIREFLECTION LAYER AND METHOD FOR MANUFACTURING PRODUCT HAVING ORGANIC ANTIREFLECTION LAYER

摘要

PPROBLEM TO BE SOLVED: To provide a method for manufacturing a composition for forming an organic antireflection layer, from which an organic antireflection layer can be formed on a substrate or at least one layer of a basecoat layer formed on the substrate surface while suppressing formation of cracks in the substrate or in the basecoat layer. PSOLUTION: The method for manufacturing a composition for forming an organic antireflection layer includes: a step of preparing a mixture for forming an antireflection layer; adjusting the prepared mixture for forming an antireflection layer by diluting and stirring; and ageing the adjusted mixture for forming an antireflection layer after stirring is terminated. The ageing step includes a step of keeping the mixture for forming an antireflection layer after the adjusting step, at a temperature of 20C to 40C for 24 to 168 hours. PCOPYRIGHT: (C)2008,JPO&INPIT