ULTRASONIC VIBRATION CUTTING DEVICE, ULTRASONIC DICING TOOL AND PERIPHERAL CUTTING TOOL ATTACHMENT FLANGE USED FOR THE SAME CUTTING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an ultrasonic vibration cutting device which converts a displacement direction of ultrasonic vibration for cutting operation, wherein ultrasonic vibration is prevented from being transferred in the thickness direction of a peripheral cutting tool to achieve high-precision cutting process.;SOLUTION: A flange is attached to a cutting blade 20 which performs rotary drive around an axis line, and which is coupled to an ultrasonic vibrator giving ultrasonic displacement and is fixed to a spindle having an ultrasonic resonator expanding and contracting in the axis direction. The flange consists of a pair of flanges 21, 22, and has a cavity 23 formed between a holding part comprising holding planes 24, 25 on the cutting blade 20 and an attachment hole part 26 provided on the spindle. A part of ultrasonic displacement transferred in the axis direction is absorbed by the cavity 23 to prevent ultrasonic vibration from being transferred in the thickness direction of the cutting blade 20, thereby converting a displacement direction of ultrasonic vibration transferred from the spindle into only a radial direction of the cutting blade 20.;COPYRIGHT: (C)2008,JPO&INPIT