MANUFACTURING METHOD OF RESIN EXHIBITING INCREASED ALKALI SOLUBILITY BY ACTION OF ACID, POSITIVE PHOTOSENSITIVE COMPOSITION COMPRISING RESIN, AND PATTERN-FORMING METHOD USING POSITIVE PHOTOSENSITIVE COMPOSITION

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a resin exhibiting increased alkali solubility by an action of an acid that exhibits improved LER and causes very few defects at the time of resist film formation, a positive photosensitive composition comprising the resin, and a pattern-forming method using the positive photosensitive composition.;SOLUTION: The manufacturing method of the resin exhibiting increased alkali solubility by an action of an acid comprises dissolving a monomer bearing an acid-dissociable dissolution-inhibiting group in a polymerization solvent and polymerizing the monomer using a polymerization initiator, where the polymerization is carried out by using at least two kinds of polymerization initiators. The positive photosensitive composition comprises (A) the resin exhibiting increased alkali solubility by an action of an acid obtained by the manufacturing method above and (B) a photo-acid generating agent generating an acid by irradiation with active rays or radiation. The pattern-forming method comprises using the positive photosensitive composition.;COPYRIGHT: (C)2008,JPO&INPIT