REMOVAL SOLUTION RECOVERY SYSTEM AFTER REMOVAL OF PROTECTIVE FILM AND METHOD OF COLLECTING REMOVAL SOLUTION AFTER REMOVAL OF PROTECTIVE FILM

摘要

PROBLEM TO BE SOLVED: To provide a removal solution recovery system which can increase a recovery rate of a removal solution after use while avoiding a reduction in the throughput of a protective film removing process.;SOLUTION: A removal solution recovery system 6 comprises a recovery tank 61 holding therein a solution containing a recovery solvent R for resolving and collecting a volatile component in a removal solution after being used; a transportation pipe 60 for transporting the volatile component into the recovery tank 61; a bubbling mechanism 63 for resolving the volatile component into the recovery solvent R; a liquid supply mechanism 62 for supplying a liquid containing a new recovery solvent into the recovery tank 61; a liquid discharging mechanism for discharging the liquid containing the recovery solvent R in the recovery tank 61; and a system controller 34 for causing the liquid discharging mechanism to discharge the liquid containing the recovery solvent R and the volatile component dissolved therein in the recovery tank 61, and for causing the liquid supply mechanism 62 to supply the liquid containing the new recovery solvent into the recovery tank 61 at predetermined timing.;COPYRIGHT: (C)2008,JPO&INPIT