MANUFACTURING METHOD OF STAMPER AND MASTER FOR MAGNETIC TRANSFER, AND STAMPER AND MASTER FOR MAGNETIC TRANSFER

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a stamper and a master for magnetic transfer for improving releasability and pattern accuracy compatibly and to provide the stamper and the master for magnetic transfer manufactured by the manufacturing method.;SOLUTION: In the manufacturing method of the stamper including a process for forming a metal thin film 61 on a stamper original plate 50 on which a rugged pattern is formed by etching and then performing electroplating, before the metal thin film 61 is formed, the stamper original plate 50 is heat-treated at 200 to 500°C in air.;COPYRIGHT: (C)2009,JPO&INPIT